{"id":3083,"date":"2017-03-22T11:57:34","date_gmt":"2017-03-22T02:57:34","guid":{"rendered":"http:\/\/power.bk.tsukuba.ac.jp\/?page_id=3083"},"modified":"2017-03-22T11:57:34","modified_gmt":"2017-03-22T02:57:34","slug":"%e5%85%90%e5%b3%b6%e3%80%80%e4%b8%80%e8%81%a1","status":"publish","type":"page","link":"http:\/\/power.bk.tsukuba.ac.jp\/?page_id=3083","title":{"rendered":"\u5150\u5cf6\u3000\u4e00\u8061"},"content":{"rendered":"

\"\u5150\u5cf6\"<\/a>\u5c45\u5ba4:<\/strong> (\u56fd)\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240\u3000\u3064\u304f\u3070\u4e2d\u592e\u7b2c2\u30002-13\u68df238\u5ba4<\/p>\n

\u5c02\u9580\u5206\u91ce\uff1a<\/strong>\u7d50\u6676\u5de5\u5b66\u3001\u534a\u5c0e\u4f53\u3001SiC\u3001\u6750\u6599\u7269\u6027<\/p>\n

\u6240\u5c5e\uff1a<\/strong>\u6570\u7406\u7269\u8cea\u7cfb\u3000\u51c6\u6559\u6388\uff08\u7269\u7406\u5de5\u5b66\u57df\uff09<\/p>\n

\u5b66\u4f4d\uff1a<\/strong>\u535a\u58eb\uff08\u5de5\u5b66\uff09<\/p>\n

 <\/p>\n

\u7d4c\u6b74<\/strong><\/h3>\n
    \n
  • \u5175\u5eab\u770c\u6d32\u672c\u5e02\u751f\u307e\u308c<\/li>\n
  • 1988\/04-1992\/03\u3000\u7b51\u6ce2\u5927\u5b66\u3000\u5b66\u58eb\u3000\uff08\u7b2c\u4e09\u5b66\u7fa4\u3000\u57fa\u790e\u5de5\u5b66\u985e\uff09<\/li>\n
  • 1992\/04-1994\/03\u3000\u7b51\u6ce2\u5927\u5b66\u3000\u4fee\u58eb\u3000\uff08\u5de5\u5b66\u7814\u7a76\u79d1\u3000\u7269\u8cea\u5de5\u5b66\u5c02\u653b\uff09<\/li>\n
  • 1994\/04-1997\/03\u3000\u7b51\u6ce2\u5927\u5b66\u3000\u535a\u58eb\u3000\uff08\u5de5\u5b66\u7814\u7a76\u79d1\u3000\u7269\u8cea\u5de5\u5b66\u5c02\u653b\uff09<\/li>\n
  • 1997\/04-2000\/03\u3000\u65e5\u672c\u539f\u5b50\u529b\u7814\u7a76\u6240\u3000\u535a\u58eb\u7814\u7a76\u54e1<\/li>\n
  • 2000\/04-2003\/03\u3000\u8ca1\u56e3\u6cd5\u4eba\u65b0\u6a5f\u80fd\u7d20\u5b50\u7814\u7a76\u958b\u767a\u5354\u4f1a\u3000\u535a\u58eb\u7814\u7a76\u54e1<\/li>\n
  • 2003\/04-\u73fe\u5728\u3000\u3000\u3000\uff08\u56fd\uff09\u7523\u696d\u6280\u8853\u7dcf\u5408\u7814\u7a76\u6240\u3000\u7814\u7a76\u54e1<\/li>\n
  • 2005\/11-2007\/03\u3000\u662d\u548c\u96fb\u5de5\u682a\u5f0f\u4f1a\u793e\u3078\u5728\u7c4d\u51fa\u5411<\/li>\n
  • 2014\/07-\u73fe\u5728\u3000\u3000\u3000\u7b51\u6ce2\u5927\u5b66 \u6570\u7406\u7269\u8cea\u7cfb \u7269\u7406\u5de5\u5b66\u57df \u51c6\u6559\u6388\u3000\uff08\u9023\u643a\u5927\u5b66\u9662\uff09<\/li>\n<\/ul>\n

    \u7814\u7a76\u30c6\u30fc\u30de<\/strong><\/h3>\n
      \n
    • \u30ef\u30a4\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306e\u6750\u6599\u958b\u767a<\/li>\n
    • SiC\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u6280\u8853\u306e\u7814\u7a76\u958b\u767a<\/li>\n
    • \u65b0\u898fSiC\u30c0\u30a4\u30aa\u30fc\u30c9\u306e\u958b\u767a<\/li>\n<\/ul>\n

      \u5b66\u5354\u4f1a<\/strong><\/h3>\n
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      • \u516c\u76ca\u793e\u56e3\u6cd5\u4eba\u5fdc\u7528\u7269\u7406\u5b66\u4f1a<\/li>\n
      • \u516c\u76ca\u793e\u56e3\u6cd5\u4eba\u7269\u7406\u5b66\u4f1a<\/li>\n<\/ul>\n

        \u8457\u66f8<\/strong><\/h3>\n
          \n
        • \u30d5\u30a9\u30fc\u30ab\u30b9\u30ec\u30dd\u30fc\u30c8\uff0c\u7b2c3\u7ae0\u3000SiC\u30d0\u30eb\u30af\u5358\u7d50\u6676\u6280\u8853\u3001\u3000\u7b2c4\u7ae0\u3000SiC\u30db\u30e2\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u6280\u8853\u3001ED\u30ea\u30b5\u30fc\u30c1\u793e\u30002008\u5e74\u3002<\/li>\n
        • \u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306e\u65b0\u5c55\u958b\uff0c\u7b2c2\u7ae0\u30003\u3000\u70ad\u5316\u73ea\u7d20\u7d50\u6676\u6027\u8584\u819c\u306e\u591a\u5f62\u5236\u5fa1\u6280\u8853\u3001\u30b7\u30fc\u30a8\u30e0\u30b7\u30fc\u51fa\u7248\u30002009\u5e74\u3002<\/li>\n<\/ul>\n

          \u53d7\u8cde\u6b74<\/strong><\/h3>\n
            \n
          • \u7b2c14\u56de(2003\u5e74\u6625\u5b63)\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u300c\u8b1b\u6f14\u5968\u52b1\u8cde\u300d\u53d7\u8cde<\/li>\n<\/ul>\n

            \u8ad6\u6587\u3001\u5b66\u4f1a\u767a\u8868\u7b49<\/strong><\/h3>\n

            2017<\/strong>\u5e74\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 <\/strong><\/h4>\n
              \n
            • \u201cStrong impact of slight trench direction misalignment from [11-20] on deep trench filling epitaxy for SiC super-junction (SJ) devices\u201d\uff0cR. Kosugi, Ji Shi-yang, K. Mochizuki, H. Kouketsu, Y. Kawada, H. Hujisawa, K. Kojima, S. Yoshida, Y. Yonezawa\uff0cJpn. J. Appl. Phys.\uff0c56\uff0c04CR05\uff0c\uff082017\uff09<\/li>\n<\/ul>\n

              \u00a0<\/strong><\/p>\n

              2016<\/strong>\u5e74<\/strong><\/h4>\n
                \n
              • \u201cEffect of H2 carrier gas on CVD growth rate for 4H-SiC trench filling\u201d\uff0c Ji Shi-yang, K. Kojima, R. Kosugi, S. Saito, Y. Sakuma, Y. Matsukawa, Y. Yonezawa, S. Yoshida, H. Okumura\uff0cMater. Sci. Forum\uff0c858\uff0c181\uff0c\uff082016\uff09<\/li>\n
              • \u201cInfluence of growth pressure on filling 4H-SiC trenches by CVD method\u201d\uff0c Ji Shi-yang, K. Kojima, R. Kosugi, S. Saito, Y. Sakuma, Y. Tanaka, S. Yoshida, H. Himi, H. Okumura\uff0cJpn. J. Appl. Phys.\uff0c55\uff0c01AC04\uff0c\uff082016\uff09<\/li>\n
              • \u201cA New Type of Single Carrier Conduction Rectifier on SiC\u201d\uff0cS. Tanimoto, K. Kamioka, T. Hujita, Y. Araki, K. Kojima, T. Makino, S. Yamazaki\uff0cMater. Sci. Forum\uff0c858\uff0c769\uff0c\uff082016\uff09<\/li>\n
              • \u201cReduction in Background Carrier Concentration for 4H-SiC C-face Epitaxial Growth\u201d\uff0cJ. Noshio, H. Asamizu, M. Kushibe, H. Kitai, K. Kojima\uff0cMRS advances\uff0c1\uff0c3631\uff0c(2016)<\/li>\n
              • \u201cProbability of low off angled 4H-SiC epitaxial wafers on power device applications\u201d\uff0cK.Kojima(Invited), K. Masumoto, H. Asamizu, S. Harada, H. Okumura\uff0cPRIME2016\uff0cHawaii\uff0cUSA\uff0c2016\/10\/03<\/li>\n
              • \u201cImprovement of Quality of Thick 4H-SiC Epilayers\u201d\uff0cA. Miyasaka, K. Kojima, K. Momose, H. Oosawa, H. Okumura\uff0c11th European Conference on Silicon Carbide and Related Materials\uff0cHalkidiki, Greece, 2016\/09\/27<\/li>\n
              • \u201cStrong impact of slight misalignment of the trench direction from [11-20] on deep trench filling epitaxy for SiC super-junction (SJ) devices\u201d\uff0cR. Kosugi, Ji Shi-yang, K. Mochizuki, H. Kouketsu, Y. Kawada, H. Hujisawa, K. Kojima, S. Yoshida, Y. Yonezawa\uff0cSSDM2016\uff0cTsukuba\uff0c2016\/09\/28<\/li>\n
              • \u201c\u96fb\u5b50\u9855\u5fae\u93e1\u6cd5\u3092\u7528\u3044\u305f4H-SiC\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u30a6\u30a7\u30fc\u30cf\u4e2d\u306e\u7d50\u6676\u6b20\u9665\u306e\u69cb\u9020\u89e3\u6790\u201d\uff0c\u5c71\u4e0b \u4efb\uff08\u62db\u5f85\uff09\u3001\u5185\u57ce\u8cb4\u5247\u3001\u5148\u5d0e \u7d14\u5bff\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u52a0\u85e4 \u667a\u4e45\u3001\u5965\u6751 \u5143\uff0c\u975e\u7b46\u982d\uff0c\u65e5\u672c\u9855\u5fae\u93e1\u5b66\u4f1a\u7b2c72\u56de\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u4ed9\u53f0\u56fd\u969b\u30bb\u30f3\u30bf\u30fc\u30012016\/06\/15<\/li>\n
              • \u201cC\u9762\u6210\u9577N\u30c9\u30fc\u30d7SiC\u6210\u819c\u306e\u305f\u3081\u306e\u6570\u5024\u89e3\u6790\u201d\uff0c\u6d45\u6c34 \u5553\u5dde\u3001\u897f\u5c3e \u8b72\u53f8\u3001\u5347\u672c \u6075\u5b50\u3001\u6adb\u90e8 \u5149\u5f18\u3001\u5150\u5cf6 \u4e00\u8061\uff0c\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u7b2c\uff13\u56de\u8b1b\u6f14\u4f1a\uff0c\u3064\u304f\u3070\u30012016\/11\/08<\/li>\n
              • \u201c\u30c8\u30ec\u30f3\u30c1\u57cb\u623b\u3057\u30a8\u30d4\u6210\u9577\u306b\u3088\u308bSiC\u30b9\u30fc\u30d1\u30fc\u30b8\u30e3\u30f3\u30af\u30b7\u30e7\u30f3\uff08SJ\uff09\u30c7\u30d0\u30a4\u30b9\u306e\u958b\u767a\u201d\uff0c\u5c0f\u6749 \u4eae\u6cbb\u3001\u7d00 \u4e16\u967d\u3001\u671b\u6708 \u548c\u6d69\u3001\u7e90\u7e88 \u82f1\u5178\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u7c73\u6fa4 \u559c\u5e78\u3001\u5965\u6751 \u5143\uff0c\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u7b2c\uff13\u56de\u8b1b\u6f14\u4f1a\uff0c\u3064\u304f\u3070\u30012016\/11\/08<\/li>\n
              • \u201c4H-SiC PiN\u30c0\u30a4\u30aa\u30fc\u30c9\u306b\u304a\u3051\u308b\u901a\u96fb\u30b9\u30c8\u30ec\u30b9\u8a98\u8d77\u7a4d\u5c64\u6b20\u9665\u306e\u8d77\u70b9\u89e3\u6790\u201d\uff0c\u6797 \u5c06\u5e73\u3001\u5185\u57ce\u3000\u8cb4\u5247\uff08\uff08\u682a\uff09\u6771\u30ec\u30ea\u30b5\u30fc\u30c1\u30f3\u30bb\u30f3\u30bf\u30fc\uff09\u3001\u5c71\u4e0b \u4efb\u3001\u5bae\u91cc \u771f\u6a39\u3001\u5442 \u6c11\u96c5\u3001\u5bae\u5cf6 \u5c07\u662d\u3001\u5148\u5d0e \u7d14\u5bff\u3001\u7c73\u6fa4 \u559c\u5e78\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u52a0\u85e4 \u667a\u4e45\u3001\u5965\u6751 \u5143\uff0c\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u7b2c3\u56de\u8b1b\u6f14\u4f1a\uff0c\u3064\u304f\u3070\u30012016\/11\/08<\/li>\n
              • \u201cEBSD-Wilkinson\u6cd5\u306b\u3088\u308bSiC\u30a6\u30a7\u30cf\u52a0\u5de5\u5909\u8cea\u5c64\u306e\u5c40\u6240\u6b6a\u307f\u89e3\u6790\u201d\uff0c\u7740\u672c \u4eab\u3001\u4f0a\u52e2 \u7acb\u5f66\u3001\u6a4b\u672c\u3000\u54f2\u3001\u6afb\u7530\u3000\u59d4\u5927\u3001\u5148\u5d0e \u7d14\u5bff\u3001\u52a0\u85e4 \u667a\u4e45\u3001\u5150\u5cf6 \u4e00\u8061\uff0c\u7b2c63\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u6771\u4eac\u5de5\u696d\u5927\u5b66\u30012016\/03\/20<\/li>\n
              • \u201c\u8d85\u9ad8\u8010\u5727\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u75284H-SiC C \u9762\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u306e\u691c\u8a0e\u201d\uff0c\u897f\u5c3e \u8b72\u53f8\u3001\u6adb\u90e8 \u5149\u5f18\u3001\u6d45\u6c34 \u5553\u5dde\u3001\u5317\u4e95 \u79c0\u61b2\u3001\u5150\u5cf6 \u4e00\u8061\u201d\uff0c\u7b2c63\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u6771\u4eac\u5de5\u696d\u5927\u5b66\u30012016\/03\/20<\/li>\n
              • \u201c4H-SiC C\u9762on-axis\u57fa\u677f\u4e0a\u306e\u30b9\u30d1\u30a4\u30e9\u30eb\u6210\u9577\u201d\uff0c\u5347\u672c \u6075\u5b50\u3001\u9f4a\u85e4 \u65b0\u543e\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u52a0\u85e4 \u667a\u4e45\u3001\u5965\u6751 \u5143\uff0c\u7b2c\uff16\uff13\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u6771\u4eac\u5de5\u696d\u5927\u5b66\u30012016\/03\/20<\/li>\n<\/ul>\n

                2015<\/strong>\u5e74<\/strong><\/h4>\n
                  \n
                • \u201cFilling 4H-SiC trench towards selective epitaxial growth by adding HCl to CVD process\u201d\uff0cJi Shi-yang, K. Kojima, R. Kosugi, S. Saito, Y. Sakuma, Y. Tanaka, S. Yoshida, H. Himi, H. Okumura, Appl. Phys. Express, 8, 065502 (2015).<\/li>\n
                • \u201cSystematic investigation on in-plane anisotropy of surface and buried channel mobility of metal-oxide-semiconductor field-effect-transistors on Si-, a-, and m-face 4H-SiC\u201d\uff0cK. Ariyoshi, R. Iijima, S. Harada, K. Kojima, J. Senzaki, Y. Tanaka, K. Takao, T. Shinohe, Appl. Phys. Lett., 106, 103506 (2015).<\/li>\n
                • \u201cExperiment on alleviating the bending of CVD-grown heavily Al-doped 4H-SiC epiwafer by codoping of N\u201d\uff0cJi Shi-yang, K. Kojima, Y. Ishida, S. Saito, H. Yamaguchi, S. Yoshida, H. Tsuchida, H. Okumura, Jpn. J. Appl. Phys., 54, 04DP08 (2015).<\/li>\n
                • \u201cHomoepitaxial growth and investigation of stacking faults of 4H-SiC C-face epitaxial layers with a 1\u00b0 off-angle\u201d\uff0cK. Masumoto, H. Asamizu, K. Tamura, C. Kudo, J. Nishio, K. Kojima, T. Ohno, H. Okumura, Jpn. J. Appl. Phys., 54, 04DP04, (2015).<\/li>\n
                • \u201cImprovement of 4H-SiC epitaxial layers grown on 2o offcut Si-face substrate\u201d\uff0cH. Asamizu, K. Tamura, C. Kudo, J. Nishio, K. Masumoto, K. Kojima\uff0cICSCRM2015\uff0cItaly\uff0c2015\/10\/06<\/li>\n
                • \u201cEffect of H2 carrier gas on CVD growth rate for 4H-SiC trench filling\u201d\uff0c Ji Shi-yang, K. Kojima, R. Kosugi, S. Saito, Y. Sakuma, Y. Matsukawa, Y. Yonezawa, S. Yoshida, H. Okumura\uff0cICSCRM2015\uff0cItaly\u30012015\/10\/07<\/li>\n
                • \u201cA New Type of Single Carrier Conduction Rectifier on SiC\u201d\uff0c S. Tanimoto, K. Kamioka, T. Hujita, Y. Araki, K. Kojima, T. Makino, S. Yamazaki\uff0cICSCRM2015\uff0cItaly\uff0c2015\/10\/07<\/li>\n
                • \u201cInfluence of growth pressure on filling 4H-SiC trenches by CVD method\u201d\uff0c Ji Shi-yang, K. Kojima, R. Kosugi, S. Saito, Y. Sakuma, Y. Tanaka, S. Yoshida, H. Himi, H. Okumura\uff0cISPlasma2015 \/ IC-PLANTS2015\uff0cNagoya\uff0c2015\/03\/27<\/li>\n
                • \u201c\u6a2a\u578bCVD\u88c5\u7f6e\u3092\u7528\u3044\u305fSiC\u30a8\u30d4\u819c\u6210\u9577\u306b\u304a\u3051\u308b\u754c\u9762\u8ee2\u4f4d\u306e\u767a\u751f\u3068\u6291\u5236\u201d\uff0c\u5de5\u85e4\u5343\u79cb\u3001\u5347\u672c \u6075\u5b50\u3001\u6d45\u6c34 \u5553\u5dde\u3001\u7530\u6751\u8b19\u592a\u90ce\u3001\u897f\u5c3e \u8b72\u53f8\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5927\u91ce \u4fca\u4e4b\uff0c\u7b2c62\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u6771\u6d77\u5927\u5b66\u30012015\/03\/12<\/li>\n
                • \u201c4H-SiC MOSFET\u306b\u304a\u3051\u308b\u30c1\u30e3\u30cd\u30eb\u79fb\u52d5\u5ea6\u306e\u9762\u65b9\u4f4d\u53ca\u3073\u30c1\u30e3\u30cd\u30eb\u65b9\u5411\u306b\u5bfe\u3059\u308b\u7570\u65b9\u6027\u306e\u7cfb\u7d71\u7684\u8a55\u4fa1\u201d\uff0c\u6709\u5409 \u6075\u5b50\u3001\u98ef\u5cf6\u826f\u4ecb\u3001\u539f\u7530 \u4fe1\u4ecb\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5148\u5d0e \u7d14\u5bff\u3001\u7530\u4e2d \u4fdd\u5ba3\u3001\u9ad8\u5c3e\u548c\u4eba\u3001\u56db\u6238\u5b5d\uff0c\u7b2c62\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u6771\u6d77\u5927\u5b66\u30012015\/03\/13<\/li>\n
                • \u201c\u6c34\u7d20\u30ad\u30e3\u30ea\u30a2\u30ac\u30b9\u306e\u6e1b\u5c11\u306b\u3088\u308b\uff14H-SiC \u30c8\u30ec\u30f3\u30c1\u57cb\u623b\u3057\u30a8\u30d4\u6210\u9577\u30ec\u30fc\u30c8\u306e\u5411\u4e0a\u201d\uff0c\u7d00 \u4e16\u967d\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5c0f\u6749 \u4eae\u6cbb\u3001\u9f4a\u85e4 \u65b0\u543e\u3001\u4f50\u4e45\u9593 \u7531\u8cb4\u3001\u677e\u5ddd \u5eb7\u5b50\u3001\u7c73\u6fa4 \u559c\u5e78\u3001\u5409\u7530 \u8c9e\u53f2\u3001\u5965\u6751 \u5143\uff0c\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a \u7b2c2\u56de\u8b1b\u6f14\u4f1a\uff0c\u5927\u962a\u30012015\/11\/09<\/li>\n
                • \u201c4H-SiC C\u9762\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u306b\u304a\u3051\u308b\u30b9\u30d1\u30a4\u30e9\u30eb\u6210\u9577\u767a\u751f\u306e\u305f\u3081\u306e\u6761\u4ef6\u201d\uff0c\u5347\u672c \u6075\u5b50\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u52a0\u85e4 \u667a\u4e45\u3001\u5965\u6751 \u5143\uff0c\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c\uff12\u56de\u8b1b\u6f14\u4f1a\uff0c\u5927\u962a\u30012015\/11\/09<\/li>\n
                • \u201c4H-SiC\u57fa\u677fSi\u9762\u4e0a\u539a\u819c\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u201d\uff0c\u5bae\u5742 \u6676\u3001\u5ddd\u7551 \u76f4\u4e4b\u3001\u897f\u5c3e \u8b72\u53f8\u3001\u5347\u672c \u6075\u5b50\u3001\u5150\u5cf6 \u4e00\u8061\uff0c\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u7b2c\uff12\u56de\u8b1b\u6f14\u4f1a\uff0c\u5927\u962a\u30012015\/11\/09<\/li>\n
                • \u201c4H-SiC C\u9762\u30a8\u30d4\u6210\u9577\u306b\u304a\u3051\u308b\u30d0\u30c3\u30af\u30b0\u30e9\u30a6\u30f3\u30c9\u30ad\u30e3\u30ea\u30a2\u6fc3\u5ea6\u4f4e\u6e1b\u691c\u8a0e\u201d\uff0c\u897f\u5c3e \u8b72\u53f8\u3001\u6d45\u6c34 \u5553\u5dde\u3001\u6adb\u90e8 \u5149\u5f18\u3001\u5317\u4e95 \u79c0\u61b2\u3001\u5150\u5cf6 \u4e00\u8061\uff0c\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u7b2c2\u56de\u8b1b\u6f14\u4f1a\uff0c\u5927\u962a\u30012015\/11\/09<\/li>\n<\/ul>\n

                  2014<\/strong>\u5e74<\/strong><\/h4>\n
                    \n
                  • \u201cDevelopment of homoepitaxial growth technique on 4H-SiC vicinal off angled substrate\u201d\uff0cK. Kojima, K. Masumoto, S. Ito, A. Nagata, Mater. Sci. Forum, 778-780, 125 (2014).<\/li>\n
                  • \u201cSuppression of 3C-Inclusion Formation during Growth of 4H-SiC Si-face Homoepitaxial Layers with a 1\u00b0 Off-Angle\u201d\uff0cK. Masumoto, H. Asamizu, K. Tamura, C. Kudo, J. Nishio, K. Kojima, T. Ohno, H. Okumura, Materials, 7, 7010 (2014).<\/li>\n
                  • \u201cSuppressing Al Memory-Effect on CVD growth of 4H-SiC Epilayers by adding Hydrogen Chloride Gas\u201d\uff0c\u3000Ji Shi-yang, K. Kojima, Y. Ishida, S, Saito, S. Yoshida, H. Tsuchida, H. Okumura, Jpn. J. Appl. Phys., 53, 04EP07 (2014).<\/li>\n
                  • \u201cLinear Energy Transfer Dependence of Single Event Gate Rupture in SiC MOS Capacitors\u201d\uff0cM. Deki, T. Makino, N. Iwamoto, S. Onoda, K. Kojima, T. Tomita, T. Ohshima, Nucl. Instrum. Meth. B, 319, 75 (2014).<\/li>\n
                  • \u201cEpitaxial Growth of 4H-SiC on 2\u00b0 off-axis (0001) Si-face Substrates\u201d\uff0cH, Asamizu, K. Tamura, C. Kudo, J. Nishio, K. Masumoto, K. Kojima\uff0c\uff0cMRS Spring Meetings & Exhibits\uff0cCalifornia\uff0cUSA\uff0c2014\/04\/22<\/li>\n
                  • \u201cFirst experimental demonstration of SiC super-junction (SJ) structure by multi-epitaxial growth method\u201d\uff0cR. Kosugi, Y. Sakuma, K. Kojima, S. Ito, A. Nagata, T. Yatsuo, Y. Tanaka, H. Okumura\uff0cISPSD2014\uff0cHAWAII, USA\u30012014\/06\/18<\/li>\n
                  • \u201c150mm\u5f84SiC\u30a6\u30a8\u30cf\u306eSORI\u306b\u5bfe\u3059\u308b\u30a8\u30d4\u6210\u9577\u306e\u5f71\u97ff\u201d\uff0c\u5de5\u85e4 \u5343\u79cb\u3001\u4f0a\u85e4 \u4f50\u5343\u5b50\u3001\u5347\u672c \u6075\u5b50\u3001\u6d45\u6c34 \u5553\u5dde\u3001\u7530\u6751 \u8b19\u592a\u90ce\u3001\u897f\u5c3e \u8b72\u53f8\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5927\u91ce \u4fca\u4e4b\uff0c2014\u5e74 \u7b2c61\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u795e\u5948\u5ddd\u770c\u30012014\/03\/17<\/li>\n
                  • \u201c4H-SiC C\u9762\u5fae\u50be\u659c\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u306b\u304a\u3051\u308b\u6210\u9577\u6761\u4ef6\u3068\u7a4d\u5c64\u6b20\u9665\u5bc6\u5ea6\u306e\u95a2\u4fc2\u201d\uff0c\u5347\u672c \u6075\u5b50\u3001\u4f0a\u85e4 \u4f50\u5343\u5b50\u3001\u6d45\u6c34 \u5553\u5dde\u3001\u7530\u6751 \u8b19\u592a\u90ce\u3001\u5de5\u85e4 \u5343\u79cb\u3001\u897f\u5c3e \u8b72\u53f8\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5927\u91ce \u4fca\u4e4b\u3001\u5965\u6751 \u5143\uff0c2014\u5e74 \u7b2c61\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u795e\u5948\u5ddd\u770c\u30012014\/03\/17<\/li>\n
                  • \u201c1\u5ea6\u30aa\u30d54H-SiC Si\u9762\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u306b\u304a\u3051\u308b\u7a4d\u5c64\u6b20\u9665\u5bc6\u5ea6\u306e\u4f4e\u6e1b\u201d\uff0c\u5347\u672c \u6075\u5b50\u3001\u6d45\u6c34 \u5553\u5dde\u3001\u7530\u6751 \u8b19\u592a\u90ce\u3001\u5de5\u85e4 \u5343\u79cb\u3001\u897f\u5c3e \u8b72\u53f8\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5927\u91ce \u4fca\u4e4b\u3001\u5965\u6751 \u5143\uff0c\u7b2c75\u56de\u3000\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u5317\u6d77\u9053\u30012014\/09\/17<\/li>\n
                  • \u201c2\u5ea6off 4H-SiC Si\u9762\u30a8\u30d4\u6210\u9577\u306b\u304a\u3051\u308b\u8868\u9762\u6b20\u9665\u4f4e\u6e1b\u201d\uff0c\u6d45\u6c34 \u5553\u5dde\u3001\u5de5\u85e4 \u5343\u79cb\u3001\u4f0a\u85e4 \u4f50\u5343\u5b50\u3001\u5347\u672c \u6075\u5b50\u3001\u897f\u5c3e \u8b72\u53f8\u3001\u7530\u6751 \u8b19\u592a\u90ce\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5927\u91ce \u4fca\u4e4b\uff0c\u7b2c75\u56de\u3000\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u5317\u6d77\u9053\u30012014\/09\/17<\/li>\n
                  • \u201c\u6a2a\u578bCVD\u88c5\u7f6e\u3092\u7528\u3044\u305fSiC\u30a8\u30d4\u819c\u6210\u9577\u306b\u304a\u3051\u308b\u5b9f\u52b9C\/Si\u6bd4\u5909\u5316\u201d\uff0c\u5de5\u85e4 \u5343\u79cb\u3001\u5347\u672c \u6075\u5b50\u3001\u6d45\u6c34 \u5553\u5dde\u3001\u7530\u6751 \u8b19\u592a\u90ce\u3001\u897f\u5c3e \u8b72\u53f8\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5927\u91ce \u4fca\u4e4b\uff0c\u7b2c75\u56de\u3000\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u5317\u6d77\u9053\u5927\u5b66\u30012014\/09\/17<\/li>\n
                  • \u201c\u30a4\u30aa\u30f3\u7167\u5c04\u3092\u884c\u3063\u305f4H-SiC MOSFET\u306b\u304a\u3051\u308b\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u201d\uff0c\u51fa\u6765\u771f\u6597\u3001\u7267\u91ce\u9ad8\u7d4b\u3001\u5bcc\u7530\u3000\u5353\u6717\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5927\u5cf6\u6b66\uff0c\u7b2c75\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\uff0c\u5317\u6d77\u9053\u30012014\/09\/17<\/li>\n
                  • \u201c4H-SiC Si\u9762\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u819c\u8868\u9762\u306e\u30b7\u30e3\u30ed\u30fc\u30d4\u30c3\u30c8\u306e\u5f62\u72b6\u304a\u3088\u3073\u5bc6\u5ea6\u306e\u5909\u5316\u201d\uff0c\u5de5\u85e4 \u5343\u79cb\u3001\u6d45\u6c34 \u5553\u5dde\u3001\u7530\u6751 \u8b19\u592a\u90ce\u3001\u897f\u5c3e \u8b72\u53f8\u3001\u5347\u672c \u6075\u5b50\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5927\u91ce \u4fca\u4e4b\uff0c\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c1\u56de\u8b1b\u6f14\u4f1a\uff0c\u611b\u77e5\u770c\u30012014\/11\/19<\/li>\n
                  • \u201c1\u5ea6\u30aa\u30d54H-SiC Si\u9762\u304a\u3088\u3073C\u9762\u6210\u9577\u306b\u304a\u3051\u308b\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6b20\u9665\u5bc6\u5ea6\u306eC\/Si\u6bd4\u4f9d\u5b58\u6027\u201d\uff0c\u5347\u672c \u6075\u5b50\u3001\u4f0a\u85e4 \u4f50\u5343\u5b50\u3001\u6d45\u6c34 \u5553\u5dde\u3001\u7530\u6751 \u8b19\u592a\u90ce\u3001\u5de5\u85e4 \u5343\u79cb\u3001\u897f\u5c3e \u8b72\u53f8\u3001\u5150\u5cf6 \u4e00\u8061\u3001\u5927\u91ce \u4fca\u4e4b\u3001\u5965\u6751 \u5143\uff0c\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c1\u56de\u8b1b\u6f14\u4f1a\uff0c\u611b\u77e5\u770c\u30012014\/11\/19<\/li>\n<\/ul>\n

                    \u7279\u8a31<\/strong><\/h3>\n

                    2016<\/strong>\u5e74<\/strong><\/h4>\n
                      \n
                    • \u70ad\u5316\u73ea\u7d20\u819c\u306e\uff23\uff36\uff24\u88c5\u7f6e\uff0c\u7279 5867913\u30012016\/01\/15<\/li>\n
                    • \u534a\u5c0e\u4f53\u69cb\u9020\u7269\u3001\u534a\u5c0e\u4f53\u88c5\u7f6e\u53ca\u3073\u8a72\u534a\u5c0e\u4f53\u69cb\u9020\u7269\u306e\u88fd\u9020\u65b9\u6cd5\uff0c9496345\uff08\u7c73\u56fd\uff09\u30012016\/11\/15<\/li>\n<\/ul>\n

                      2015<\/strong>\u5e74<\/strong><\/h4>\n
                        \n
                      • \u70ad\u5316\u73ea\u7d20\u5358\u7d50\u6676\u304a\u3088\u3073\u305d\u306e\u88fd\u9020\u65b9\u6cd5\uff0c\u7279 5839315\u30012015\/11\/20<\/li>\n
                      • \u70ad\u5316\u73ea\u7d20\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u30a6\u30a8\u30cf\u3001\u540c\u30a6\u30a8\u30cf\u306e\u88fd\u9020\u65b9\u6cd5\u53ca\u3073\u540c\u30a6\u30a8\u30cf\u4e0a\u306b\u4f5c\u88fd\u3055\u308c\u305f\u534a\u5c0e\u4f53\u88c5\u7f6e\uff0c1657740\uff08\u30d5\u30e9\u30f3\u30b9\uff09\u30012015\/01\/07<\/li>\n
                      • \u70ad\u5316\u73ea\u7d20\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u30a6\u30a8\u30cf\u3001\u540c\u30a6\u30a8\u30cf\u306e\u88fd\u9020\u65b9\u6cd5\u53ca\u3073\u540c\u30a6\u30a8\u30cf\u4e0a\u306b\u4f5c\u88fd\u3055\u308c\u305f\u534a\u5c0e\u4f53\u88c5\u7f6e\uff0c602004046468.6\uff08\u30c9\u30a4\u30c4\uff09\u30012015\/01\/07<\/li>\n<\/ul>\n

                        2014<\/strong>\u5e74<\/strong><\/h4>\n
                          \n
                        • \u70ad\u5316\u73ea\u7d20\u5358\u7d50\u6676\u306e\u88fd\u9020\u88c5\u7f6e\u304a\u3088\u3073\u88fd\u9020\u65b9\u6cd5\uff0c\u7279 5659381\u30012014\/12\/12<\/li>\n
                        • \u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\uff33\uff49\uff23\u5358\u7d50\u6676\u57fa\u677f\u53ca\u3073\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\uff33\uff49\uff23\u5358\u7d50\u6676\u57fa\u677f\u306e\u88fd\u9020\u65b9\u6cd5\uff0c8716718\uff08\u7c73\u56fd\uff09\u30012014\/05\/06<\/li>\n<\/ul>\n

                          2013<\/strong>\u5e74<\/strong><\/h4>\n
                            \n
                          • \u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\uff33\uff49\uff23\u5358\u7d50\u6676\u57fa\u677f\u53ca\u3073\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\uff33\uff49\uff23\u5358\u7d50\u6676\u57fa\u677f\u306e\u88fd\u9020\u65b9\u6cd5\uff0c\u7279 5273741\u30012013\/05\/24<\/li>\n
                          • \u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\uff33\uff49\uff23\u5358\u7d50\u6676\u57fa\u677f\u53ca\u3073\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\uff33\uff49\uff23\u5358\u7d50\u6676\u57fa\u677f\u306e\u88fd\u9020\u65b9\u6cd5\uff0cZL200880106397.5\uff08\u4e2d\u56fd\uff09\u30012013\/04\/17<\/li>\n
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